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碳化硅,從材料到模塊
碳化硅功率器件的制備,經(jīng)歷了從材料生長(zhǎng)(襯底材料)—>材料外延—>半導(dǎo)體器件設(shè)計(jì)/流片/晶圓加工—>封裝(分立,模...
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